EURAMET supplementary comparison EURAMET.L-S26.1, measurement of groove depth standards in the range 5 μm up to 0.9 mm

Autor: A Lassila, V Byman, J Kirchhoff, M Aksulu, M Ozaita, L Carcedo
Rok vydání: 2023
Předmět:
Zdroj: Metrologia. 60:04003
ISSN: 1681-7575
0026-1394
DOI: 10.1088/0026-1394/60/1a/04003
Popis: Main text In this supplementary comparison depths of six v-shaped grooves with nominal values 5/20/50/200/600 and 900 μm were measured. The depths were measured according to ISO 5436-1. The PTB nickel depth setting standard was used as reference standard. PTB and MIKES measures all depths, CEM 2 and UME 3 larger depths. The results with associated uncertainties were in agreement. To reach the main text of this paper, click on Final Report. Note that this text is that which appears in Appendix B of the BIPM key comparison database https://www.bipm.org/kcdb/. The final report has been peer-reviewed and approved for publication by the CCL, according to the provisions of the CIPM Mutual Recognition Arrangement (CIPM MRA).
Databáze: OpenAIRE