Fabrication and complex investigation of LAFE based on CNT by PECVD with island catalyst

Autor:	M A Chumak, A A Rokacheva, L A Filatov, A G Kolosko, S V Filippov, E O Popov
Rok vydání:	2021
Předmět:	History Computer Science Applications Education
Zdroj:	Journal of Physics: Conference Series. 2103:012110
ISSN:	1742-6596 1742-6588
DOI:	10.1088/1742-6596/2103/1/012110
Popis:	This paper presents a study of large area field emitter based on carbon nanotubes grown by PECVD method on Si/SiO2 substrate with Fe catalyst. The catalyst was deposited by CVD on the substrate from ferrocene in the form of islands. The sample creation technology was described and results of the emission properties study were presented. Current-voltage characteristics were registered and tested for compliance with the cold field emission regime. The fluctuation statistic of effective microscopic parameters was constructed. Using data from a computerized field projector, the emission profile of the sample was calculated.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::b6cc6846938514a5034d4039458bbd18 https://doi.org/10.1088/1742-6596/2103/1/012110 Zobrazit plný text záznamu