Micro-opto-mechanical vibration sensor integrated on silicon

Autor:	E. Ollier, C. Chabrol, P. Philippe, P. Mottier
Rok vydání:	1999
Předmět:	Engineering Frequency response Multi-mode optical fiber Silicon business.industry Transductor Electrical engineering chemistry.chemical_element Atomic and Molecular Physics and Optics Vibration Surface micromachining Transducer chemistry business Sensitivity (electronics)
Zdroj:	Journal of Lightwave Technology. 17:26-29
ISSN:	0733-8724
DOI:	10.1109/50.737417
Popis:	A new micro-optical vibration sensor has been achieved by combining "integrated optics" and "micromachining" on silicon technologies. The high sensitivity and the wide frequency range have been obtained by using a multimode section in the optical detection circuit. Three prototypes have been installed successfully in an industrial hydroelectric power plant.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::b6c055ed26e14ae3aa05f7110e9b3a3f https://doi.org/10.1109/50.737417 Zobrazit plný text záznamu