| Autor: |
W. Diete, M. Getta, S. Kolesov, B. Aschermann, G. Müller, B. Gurzinski, H. Chaloupka, T. Kaiser, Helmut Piel, R. Theisejans, Matthias Hein, H. Schlick, M. Jeck |
| Rok vydání: |
1997 |
| Předmět: |
|
| Zdroj: |
IEEE Transactions on Appiled Superconductivity. 7:1287-1290 |
| ISSN: |
1051-8223 |
| DOI: |
10.1109/77.620754 |
| Popis: |
We have extended the planar DC high oxygen-pressure sputtering process for the successive non-scanning deposition of epitaxial YBa/sub 2/Cu/sub 3/O/sub 7-/spl part// (YBCO) films up to 2" in diameter and 600 nm in thickness. Contamination of the heater-facing side of the LaAlO/sub 3/ substrates could be prevented by use of a thin quartz glass plate. For optimized deposition parameters, inductive measurements indicated comparable and homogeneous quality of both film sides, i.e. T/sub c/>88 K and J/sub c/(77 K) >2 MA/cm/sup 2/. Surface resistance measurements at 19 GHz with a Nb-shielded sapphire resonator resulted in R/sub s/ |
| Databáze: |
OpenAIRE |
| Externí odkaz: |
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