Effects of the High Power Pulsed Magnetron Sputtering Deposition Conditions on Structure of Diamond Like Carbon:Cu Films
| Autor: | Arvydas Čiegis, Š. Meškinis, Sigitas Tamulevičius, G. Niaura, Mindaugas Andrulevičius, K. Šlapikas, Tomas Tamulevičius, Andrius Vasiliauskas |
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| Rok vydání: | 2016 |
| Předmět: |
010302 applied physics
Materials science Diamond-like carbon business.industry Biomedical Engineering Bioengineering 02 engineering and technology General Chemistry Sputter deposition 021001 nanoscience & nanotechnology Condensed Matter Physics 01 natural sciences Carbon film 0103 physical sciences Optoelectronics General Materials Science 0210 nano-technology business Deposition (chemistry) |
| Zdroj: | Journal of Nanoscience and Nanotechnology. 16:10133-10142 |
| ISSN: | 1533-4899 1533-4880 |
| DOI: | 10.1166/jnn.2016.12847 |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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