Laser-induced fluorescence of OH and SiO molecules during thermal chemical vapour deposition of SiO2 from silane-oxygen mixtures
| Autor: | Peter van de Weijer, Bauke H. Zwerver |
|---|---|
| Rok vydání: | 1989 |
| Předmět: |
General Physics and Astronomy
chemistry.chemical_element Rotational temperature Chemical vapor deposition Photochemistry Silane Diatomic molecule Oxygen Condensed Matter::Materials Science chemistry.chemical_compound chemistry Molecule Physics::Chemical Physics Physical and Theoretical Chemistry Laser-induced fluorescence Vibrational temperature |
| Zdroj: | Chemical Physics Letters. 163:48-54 |
| ISSN: | 0009-2614 |
| Popis: | During low-pressure chemical vapour deposition of SiO2 from thermally activated mixtures of silane and oxygen, laser-induced fluorescence is observed from OH and SiO molecules. From these measurements the rotational and vibrational temperatures are derived. The continuous nature of the observed oxygen chemiluminescence might be explained by a high vibrational temperature, which is not in equilibrium with the rotational temperature. Oxygen molecules are probably excited in the gas-phase reaction step SiO+O+O2→SiO2+O2*. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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