Area-selective atomic layer deposition of Ru thin films using phosphonic acid self-assembled monolayers for metal/dielectric selectivity

Autor:	Seo-Hyun Lee, Jeong-Min Lee, Ji Hun Lee, Junghun Kwak, Sung-Woong Chung, Woo-Hee Kim
Rok vydání:	2022
Předmět:	Mechanics of Materials Mechanical Engineering General Materials Science Condensed Matter Physics
Zdroj:	Materials Letters. 328:133187
ISSN:	0167-577X
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::b6290d3e89b1aa457510c8a67183eb80 https://doi.org/10.1016/j.matlet.2022.133187 Zobrazit plný text záznamu Full Text from ScienceDirect