Characterization of W/Si multilayers by ultrasoft x-ray emission spectroscopy

Autor:	S. N. Shamin, Stefan Luby, G. Wiech, Ernst Z. Kurmaev, Eva Majkova, V. R. Galakhov
Rok vydání:	1995
Předmět:	Materials science Mechanics of Materials Annealing (metallurgy) Mechanical Engineering Phase (matter) Analytical chemistry General Materials Science Emission spectrum Condensed Matter Physics X Ray Emission Spectroscopy Amorphous solid Characterization (materials science)
Zdroj:	Journal of Materials Research. 10:907-911
ISSN:	2044-5326 0884-2914
DOI:	10.1557/jmr.1995.0907
Popis:	The SiL2.3 emission spectra of amorphous W/Si multilayers were measured. For the as-deposited samples the SiL2,3 emission spectra have been found to be very close to that of amorphous Si. The formation of WSi2 phase during annealing of W/Si multilayers at a temperature ≥50 °C was detected. From the SiL2,3 emission spectra of as-deposited and annealed samples, the amount of W/Si2 phase was estimated. It is shown that this technique can be used for quantitative estimation of the ratio of amorphous Si and WSi2 phases in W/Si multilayers.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::b628e76d12dbeeb7d86b9b7d186ecec4 https://doi.org/10.1557/jmr.1995.0907 Zobrazit plný text záznamu Full text from SpringerLink