Demonstration of uniform and reliable GaN p-i-p-i-n separate-absorption and multiplication ultraviolet avalanche photodiode arrays with large detection area

Autor: Ashok K. Sood, Shyh-Chiang Shen, Marzieh Bakhtiary-Noodeh, Russell D. Dupuis, Sachidananda Babu, Nibir K. Dhar, Theeradetch Detchprohm, Jay Lewis, P. Parminder Ghuman, Hoon Jeong, Mi-Hee Ji
Rok vydání: 2019
Předmět:
Zdroj: Gallium Nitride Materials and Devices XIV.
Popis: Front-illuminated GaN p-i-p-i-n separate-absorption and multiplication avalanche photodiode (SAM-APD) epitaxial structures were grown by metalorganic chemical vapor deposition (MOCVD) on n-type bulk GaN substrates and fabricated into 4×4 arrays with a large detection area of 100×100 μm2. The SAM-APD array showed a uniform distribution of dark current density of JDark
Databáze: OpenAIRE