Surface Modification of CdTe Crystal by Plasma Treatment Using Various Gases

Autor:	Minoru Toguchi, Akira Higa, Ryoichi Ohno, Takehiro Maehama, Atsushi Nishihira, Hiroyuki Toyama, Masaaki Yamazato
Rok vydání:	2005
Předmět:	Crystal X-ray photoelectron spectroscopy Chemistry Scanning electron microscope Schottky barrier General Engineering Analytical chemistry General Physics and Astronomy Surface modification Plasma Surface layer Stoichiometry
Zdroj:	Japanese Journal of Applied Physics. 44:6714
ISSN:	1347-4065 0021-4922
DOI:	10.1143/jjap.44.6714
Popis:	Plasma treatments using various gases have been applied to CdTe(111) surfaces. The induced surface layer composition and morphology were analyzed by X-ray photoelectron spectroscopy and field-emission scanning electron microscopy. He and Ar plasma treatments yielded an approximately stoichiometric surface and morphologies with a pyramidal structure. The surface with the H2 plasma treatment had ball-like particles and was Cd-rich. Furthermore, the surface with the O2 plasma treatment was almost oxidized. An Al/CdTe Schottky contact formed on the surface after the He, Ar, and H2 plasma treatments showed good rectification properties due to elimination of a Te-rich layer.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::b5cc2a55098bf4e785c83a7ce0df5f77 https://doi.org/10.1143/jjap.44.6714 Zobrazit plný text záznamu