Characterization of Aluminum Nitride/Aluminum Oxide Reactively Sputtered Antireflection Coatings

Autor:	TM Donovan, LF Johnson, CD Marrs, LG Koshigoe
Rok vydání:	2008
Předmět:	Materials science business.industry Metallurgy chemistry.chemical_element Nitride Laser law.invention Characterization (materials science) Micrometre chemistry law Aluminium Scratch Sputtering Electron beam processing Optoelectronics business computer computer.programming_language
DOI:	10.1520/stp23125s
Popis:	Aluminum nitride/aluminum oxide multilayer protective antireflection coatings are being developed for use on laser windows. These materials have been shown to be relatively stable and scratch resistant, thus demonstrating their applicability for this use. Both two- and three-layer coatings were designed at the wavelength of 0.500 micrometer. The design techniques utilized, as well as the resulting transmission spectra, are discussed.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::b527adfff16ef4d687509901f3ba2c0d https://doi.org/10.1520/stp23125s Zobrazit plný text záznamu