Optimization of L10-FePt/MgO/CrRu thin films for next-generation magnetic recording media
Autor: | Robert Fernandez, Nissim Amos, Beomseop Lee, Sakhrat Khizroev, Chen Zhang |
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Rok vydání: | 2011 |
Předmět: | |
Zdroj: | Thin Solid Films. 519:8053-8057 |
ISSN: | 0040-6090 |
DOI: | 10.1016/j.tsf.2011.06.098 |
Popis: | L1 0 -FePt thin films were deposited on silicon substrates with the structure of Si/CrRu/MgO/FePt. The magnetic and microstructural properties were optimized by varying the FePt sputter pressure and temperature, as well as the thicknesses of all three layers. High coercivity films greater than 1.8 T were grown when the FePt sputter pressure was at 1.33 Pa with a thickness of only 4 nm, on CrRu and MgO underlayers as thin as 10 nm and 2 nm, respectively. |
Databáze: | OpenAIRE |
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