Nickel Silicide Phase Distribution of Electroless Deposited Contacts on Silicon P+ Junction Substrate Using Nano-Indented Atomic Force Microscopy
| Autor: | Areum Kim, Longshou Zheng, Soon Hyeong Kwon, Minwoo Nam, EunMi Choi, Sung Gyu Pyo, Keunwon Kang |
|---|---|
| Rok vydání: | 2017 |
| Předmět: |
Materials science
Silicon Atomic force microscopy chemistry.chemical_element 02 engineering and technology Substrate (electronics) 010402 general chemistry 021001 nanoscience & nanotechnology 01 natural sciences 0104 chemical sciences Nickel silicide chemistry Phase (matter) Nano General Materials Science Composite material 0210 nano-technology |
| Zdroj: | Science of Advanced Materials. 10:542-546 |
| ISSN: | 1947-2935 |
| DOI: | 10.1166/sam.2018.3059 |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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