Crystallite geometry of hot filament chemical vapor deposited diamond

Autor: R.E. Clausing, W. Brock Alexander, Paul H. Holloway, L. Heatherly
Rok vydání: 1992
Předmět:
Zdroj: Surface and Coatings Technology. :387-391
ISSN: 0257-8972
DOI: 10.1016/s0257-8972(07)80053-3
Popis: Diamond crystallites and thin films were grown on (100) Si using CH 4 , CO and H 2 gases flowing over a heated tungsten filament. The relative sizes of the {100} and {111} facets were used to characterize the growth rate ratio along these two crystal directions. The ratio depended upon the composition of the feed gases as well as the filament temperature. These results were discussed in terms of developing a specific texture in polycrystalline diamond and in terms, of adsorption mechanisms which could explain the dependence.
Databáze: OpenAIRE