Restoration of Optical Properties of Surfaces by Radiofrequency-Excited Oxygen

Autor:	George L. Carlson, John R. Hollahan, Roger B. Gillette
Rok vydání:	1970
Předmět:	chemistry.chemical_classification Materials science genetic structures business.industry General Engineering chemistry.chemical_element Polymer Plasma Oxygen eye diseases Outgassing Optics chemistry Excited state Atomic oxygen Radio frequency Atomic physics business Ultraviolet radiation
Zdroj:	Journal of Vacuum Science and Technology. 7:534-537
ISSN:	0022-5355
DOI:	10.1116/1.1315870
Popis:	Optical devices contaminated mirror surfaces restoration with atomic oxygen from RF plasma by noncontaminating nondestructive oxidation of polymer film
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::b4e4ba26cdcdec68b5f80735000d61e6 https://doi.org/10.1116/1.1315870 Zobrazit plný text záznamu