MEMS-based thick film PZT vibrational energy harvester

Autor:	Karen Birkelund, Rasmus Lou-Møller, Karsten Kryger Hansen, Ruichao Xu, Anders Lei, Anders Thyssen, Erik Vilain Thomsen, Thomas Christiansen, Adam Carsten Stoot
Rok vydání:	2011
Předmět:	Microelectromechanical systems Materials science Silicon business.industry chemistry.chemical_element Silicon on insulator chemistry Etching (microfabrication) Electronic engineering Unimorph Optoelectronics Wafer Proof mass business Microfabrication
Zdroj:	2011 IEEE 24th International Conference on Micro Electro Mechanical Systems.
DOI:	10.1109/memsys.2011.5734377
Popis:	We present a MEMS-based unimorph silicon/PZT thick film vibrational energy harvester with an integrated proof mass. We have developed a process that allows fabrication of high performance silicon based energy harvesters with a yield higher than 90%. The process comprises a KOH etch using a mechanical front side protection of an SOI wafer with screen printed PZT thick film. The fabricated harvester device produces 14.0 µW with an optimal resistive load of 100 kΩ from 1g (g=9.81 m s−2) input acceleration at its resonant frequency of 235 Hz.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::b4d6c69f4f0a1d3dd85f45b67f839ce3 https://doi.org/10.1109/memsys.2011.5734377 Zobrazit plný text záznamu