An improved method for determining carrier densities via drive level capacitance profiling

Autor: Ellis T. Roe, William N. Shafarman, Charles W. Warren, D. Westley Miller, Mark C. Lonergan
Rok vydání: 2017
Předmět:
Zdroj: Applied Physics Letters. 110:203901
ISSN: 1077-3118
0003-6951
Popis: We demonstrate that an analytic relationship between coefficients in the Taylor expansion of the junction capacitance can be exploited to yield more precise determinations of carrier densities in drive level capacitance profiling (DLCP). Improvements are demonstrated on data generated according to the DLCP theory and in measurements performed on a CuInxGa1–xSe2 device. We argue that the improved DLCP method is especially important for non-uniform devices, which are more susceptible to noise in the capacitance data used in DLCP because they require that the amplitude of the drive level be restricted. Importantly, the analysis does not require the collection of any data other than what is typically collected during a DLCP measurement while employing fewer independent parameters than the model that is typically used in DLCP. Thus, we expect that it will be readily adoptable by those who perform DLCP measurements.
Databáze: OpenAIRE