Measurement of wavefront aberration for high NA objective and some special problems

Autor:	吕保斌 Lü Bao-bin, 蒋亚东 Jiang Ya-dong, 邢廷文 Xing Tingwen, 刘志祥 Liu Zhi-xiang
Rok vydání:	2016
Předmět:	Physics Wavefront aberration Optics business.industry business Atomic and Molecular Physics and Optics Electronic Optical and Magnetic Materials
Zdroj:	Optics and Precision Engineering. 24:482-490
ISSN:	1004-924X
DOI:	10.3788/ope.20162403.0482
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::b4b3397a582ae0d5ef3424b546cd22c8 https://doi.org/10.3788/ope.20162403.0482 Zobrazit plný text záznamu