Nematic liquid crystal alignment on the ion beam-exposed ZnO film
Autor: | Joo-Hong Seo, Jae Chang Kim, Soo-Won Hwang, Tae-Hoon Yoon |
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Rok vydání: | 2010 |
Předmět: |
Materials science
Ion beam Scanning electron microscope business.industry Metals and Alloys Surfaces and Interfaces Surfaces Coatings and Films Electronic Optical and Magnetic Materials Ion Optics Electrical resistivity and conductivity Liquid crystal Physical vapor deposition Materials Chemistry Transmittance Optoelectronics Thin film business |
Zdroj: | Thin Solid Films. 519:885-889 |
ISSN: | 0040-6090 |
DOI: | 10.1016/j.tsf.2010.08.105 |
Popis: | This paper investigates the nematic liquid crystal (NLC) alignment on ion beam-exposed zinc oxide (ZnO) films. The ZnO films are deposited by a radio frequency magnetron sputtering. During the deposition of ZnO film, we supplied sufficient oxygen gas for high resistivity and transmittance. The deposited films show a high transmittance of over 90% and high resistivity of over 1010 Ω cm. The ZnO films show a high deposition rate of 26.7 A/min. Images obtained via scanning electron microscopy of the ZnO film surfaces, before and after the ion beam exposure, show that groove patterns are formed being to be parallel to the ion beam exposure direction. LC cells are fabricated with the ion beam-exposed ZnO films. The NLC molecules align parallel to the ion beam exposure direction. The electro-optic and response characteristics of fabricated cells show the possibility of application to liquid crystal displays. |
Databáze: | OpenAIRE |
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