Frequency Fluctuations in CMOS-MEMS Oscillators: Towards the Thermomechanical Limit
| Autor: | Jaume Segura, R. Perello-Roig, Jaume Verd, Sebastia Bota |
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| Rok vydání: | 2018 |
| Předmět: |
010302 applied physics
Time delay and integration Microelectromechanical systems Materials science Noise measurement business.industry 02 engineering and technology 021001 nanoscience & nanotechnology 01 natural sciences Temperature measurement Computer Science::Other Vibration Resonator 0103 physical sciences Limit (music) Optoelectronics 0210 nano-technology business Excitation |
| Zdroj: | ISCAS |
| Popis: | We measured the frequency stability of fully integrated self-sustained CMOS-MEMS oscillators and compared it with the theoretical thermomechanical limit. Experimental data obtained from a fully CMOS compatible CC-Beam MEMS resonator with on-chip capacitive readout and electrostatic excitation in open- and closed-loop configuration is provided. Our results show that the frequency stability is 1.8 ppm in ambient air conditions for an integration time of 40ms, and 0.63 ppm in vacuum, being only two times larger than the ultimate limit set by the thermomechanical vibrations. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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