Abbreviated tomography techniques for quick correction of slides in 3-Dimensional NAND Flash architectures

Autor:	Hee-Beom Lee, Masahiro Ishimaru, John McPhillips, Roger L. Alvis, Timothy A. Johnson, Christopher H. Kang, Inchang Choi, Youngjin Cho, Kiju Choi
Rok vydání:	2022
Zdroj:	2022 IEEE International Symposium on the Physical and Failure Analysis of Integrated Circuits (IPFA).
DOI:	10.1109/ipfa55383.2022.9915708
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::b47c4a33097412b43e170d78b111d4a5 https://doi.org/10.1109/ipfa55383.2022.9915708 Zobrazit plný text záznamu