Mechanisms of Halogen Chemisorption upon a Semiconductor Surface: I2, Br2, Cl2, and C6H5Cl Chemisorption upon the Si(100) (2.times.1) Surface
Autor: | Harris C. Flaum, Daniel J. D. Sullivan, Andrew C. Kummel |
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Rok vydání: | 1994 |
Předmět: | |
Zdroj: | The Journal of Physical Chemistry. 98:1719-1731 |
ISSN: | 1541-5740 0022-3654 |
Popis: | Chemisorption probabilities (S) of monoenergetic I 2 , Br 2 , Cl 2 , and C 6 H 5 Cl beams have been measured on the Si(100)(2×1) surface. The sticking probabilities (S) were measured as a function of the incident translational energy (E i ), the surface temperature (T s ), the angle between the incident beam and the surface normal (θ i ), and the surface adsorbate coverage (θ). All three diatomic halogens can adsorb via both precursor-mediated and direct-activated chemisorption, while C 6 H 5 Cl adsorbs only by precursor-mediated chemisorption. For the diatomic halogens, precursor-mediated chemisorption is most significant for I 2 , followed by Br 2 , and Cl 2 |
Databáze: | OpenAIRE |
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