Computational Study of Directed Self-Assembly in Neutral Prepatterns for a Graphoepitaxial Pitch-Multiplication Application

Autor:	Glenn H. Fredrickson, Tatsuhiro Iwama, Michael Carilli, Kris T. Delaney, Nabil Laachi, Bongkeun Kim
Rok vydání:	2015
Předmět:	Inorganic Chemistry Directed self assembly Template Materials science Polymers and Plastics Annealing (metallurgy) Chemical physics Organic Chemistry Materials Chemistry Nanotechnology Kinetic energy
Zdroj:	Macromolecules. 48:1256-1261
ISSN:	1520-5835 0024-9297
Popis:	We use self-consistent field theory to investigate the directed self-assembly of cylinder-forming block copolymers for the purpose of a graphoepitaxial pitch multiplication. We focus in particular on conditions where two minor-block cylinders form inside confining rounded templates with neutral sidewalls and substrates. In addition to perfect cylinders, various defective morphologies can also self-assemble in the guiding templates. According to SCFT simulations, the formation energy of defects is typically above 20kT, or fewer than 2 defects per billion structures. We also use calculations based on the string method to explore the most probable transition pathways during the melting of defects into perfect cylinders. From our string calculations, the kinetic barrier associated with the melting process is often less 1.5kT, suggesting relatively short annealing times for the complete removal of defects.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::b451a9de5afb085d90194f9e80521253 https://doi.org/10.1021/ma502276k Zobrazit plný text záznamu