Barrierless ALD Molybdenum for Buried Power Rail and Via-to-Buried Power Rail metallization

Autor:	Anshul Gupta, Jan Willem Maes, Nicolas Jourdan, Chiyu Zhu, Sukanya Datta, Olalla Varela Pedreira, Quoc Toan Le, Dunja Radisic, Nancy Heylen, Antoine Pacco, Shouhua Wang, Moataz Mousa, Young Byun, Felix Seidel, Bart de Wachter, Gayle Murdoch, Zsolt Tokei, Eugenio Dentoni Litta, Naoto Horiguchi
Rok vydání:	2022
Zdroj:	2022 IEEE International Interconnect Technology Conference (IITC).
DOI:	10.1109/iitc52079.2022.9881304
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::b42768f8bdfda564d254b2f1b5c7c83e https://doi.org/10.1109/iitc52079.2022.9881304 Zobrazit plný text záznamu