Piezoelectric MEMS mirror optimized by particle swarm optimization algorithm

Autor:	Yufeng Wang, Gary Li, Qin Zhou, Sergio F. Almeida Loya, Sae Won Lee, Derek Ho, Youmin Wang
Rok vydání:	2022
Zdroj:	MOEMS and Miniaturized Systems XXI.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::b4189a5f8ca4f857278358b45f8a4c7f https://doi.org/10.1117/12.2610240 Zobrazit plný text záznamu