Introduction of a surface charge analysis instrument into the microelectronic engineering curricula at the Rochester Institute of Technology

Autor:	M.A. Jackson, J.A. Will
Rok vydání:	2002
Předmět:	Spectrum analyzer Engineering Passivation business.industry Annealing (metallurgy) Oxide Engineering curricula Nanotechnology Engineering physics law.invention Capacitor chemistry.chemical_compound chemistry law Microelectronics Surface charge business
Zdroj:	Proceedings of the Eleventh Biennial University/Government/ Industry Microelectronics Symposium.
DOI:	10.1109/ugim.1995.514152
Popis:	A SCA-2000 Surface Charge Analyzer has been loaned to the Microelectronic Engineering Department at RIT for use in undergraduate laboratories and research projects. To illustrate the process monitoring capability of the SCA, a designed experiment was performed to study the effects of variations in post-oxidation anneal and pull temperature on total oxide charge (Q/sub o/x). The SCA measurements on the as grown oxide were compared to C-V results from capacitors fabricated on the same films. Although absolute values of Q/sub o/x did not match, an overall correlation between the two sets of data was observed. It is hypothesized that the lower Q/sub ox/ values observed with C-V are the result of hydrogen passivation of Q/sub it/.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::b407bd98b1ec9f18eeccf1a379510e48 https://doi.org/10.1109/ugim.1995.514152 Zobrazit plný text záznamu