Comparing fusion bonding methods for glass substrates
| Autor: | Aleksei N. Marianov, David W. Inglis, Timo Mayer |
|---|---|
| Rok vydání: | 2018 |
| Předmět: |
010302 applied physics
Microelectromechanical systems Fusion Materials science Polymers and Plastics Bond strength Microfluidics Metals and Alloys Float glass 02 engineering and technology 021001 nanoscience & nanotechnology 01 natural sciences Surfaces Coatings and Films Electronic Optical and Magnetic Materials law.invention Annealing (glass) Biomaterials Piranha Chemical engineering law 0103 physical sciences 0210 nano-technology Microfabrication |
| Zdroj: | Materials Research Express. 5:085201 |
| ISSN: | 2053-1591 |
| Popis: | Glass bonding is often necessary in microfluidic, nanofluidic and MEMS applications. Fusion bonding is a popular method in which glass substrates are permanently bonded using chemical treatment, low pressure and annealing. This project investigates a range of bonding methods and measures the bond strength. Float glass substrates were chemically cleaned and prepared using four different methods (Ethanol Rub, Ethanol Rub + NH4OH, piranha + NH4OH, and piranha + HCl + NH4OH), pressed together by hand, and placed in the oven at 400 °C for 10 h. Bond strength was assessed using compressive shear stress. It was determined that the piranha + HCl +NH4OH produced the strongest bond. All methods produced satisfactory bonds and the simplicity and safety of a simple Ethanol rub means it should be considered whenever possible. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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