Carbon Nanoparticle/Hydrogenated Amorphous Carbon Composite Thin Films Formed in ECR Plasma

Autor:	Aleksander Drenik, Maria Calafat, Richard Clergereaux, Pavel Yuryev, Aref Slim
Rok vydání:	2011
Předmět:	Materials science Polymers and Plastics Composite number Nanoparticle chemistry.chemical_element Condensed Matter Physics Electron cyclotron resonance Carbon film chemistry Amorphous carbon Graphite Thin film Composite material Carbon
Zdroj:	Plasma Processes and Polymers. 8:401-408
ISSN:	1612-8850
DOI:	10.1002/ppap.201000151
Popis:	Composite thin films are deposited from acetylene in a microwave multipolar plasma excited at distributed electron cyclotron resonance in one single process. The composite consists of carbon-based nanoparticles embedded in a hydrogenated amorphous matrix. Effects of plasma duration and microwave power on the composite thin film are described along with the powder growth mechanisms. Indeed, two types of nanoparticles are formed: pure graphite-like and graphite-like shell with a metallic core. The first type grows from recombinations in the plasma phase, while core-shelled starts from a metallic core generated from the reactor walls. These metallic clusters can be heated while immersed in the plasma which leads to catalytic growth of powders.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::b372eff4f1f666c779deacabc0bafafd https://doi.org/10.1002/ppap.201000151 Zobrazit plný text záznamu Plný text