Raman studies of phase and atomic compositions of GeSi nanosystems after pulsed annealing

Autor: Jiri Stuchlik, Igor G. Neizvestny, G. K. Krivyakin, A. V. Dvurechenskii, Vladimir A. Volodin, S. A. Kochubei, Alexander A. Shklyaev
Rok vydání: 2016
Předmět:
Zdroj: Optoelectronics, Instrumentation and Data Processing. 52:496-500
ISSN: 1934-7944
8756-6990
DOI: 10.3103/s8756699016050113
Popis: The phase and elemental compositions of GeSi heterostructures deposited on non-refractory substrates are analyzed by using a non-destructive express technique, i.e., the Raman spectroscopy. It is shown that application of pulsed laser annealing allows one to vary the elemental composition and size of nanocrystals formed from solid alloys of germanium and silicon.
Databáze: OpenAIRE