Defect Passivation and Reliability Enhancement by Low-Temperature-High-Pressure Hydrogenation in LDMOS With 0.13-μm Bipolar-CMOS-DMOS Technology

Autor:	Wei-Chieh Hung, Wei-Chun Hung, Ting-Chang Chang, Yu-Fa Tu, Min-Chen Chen, Chien-Hung Yeh, Hung-Ming Kuo, Ya-Huan Lee, Wei-Ting Yen, Fu-Chen Liang
Rok vydání:	2023
Předmět:	Electrical and Electronic Engineering Electronic Optical and Magnetic Materials
Zdroj:	IEEE Electron Device Letters. 44:789-792
ISSN:	1558-0563 0741-3106
DOI:	10.1109/led.2023.3260865
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::b36352243eef951b5d17b45d9f57e0a9 https://doi.org/10.1109/led.2023.3260865 Zobrazit plný text záznamu