Development of a one-dimensional differential deposition system for X-ray mirror figure correction
| Autor: | Jangwoo Kim, Jung Sue Kim, Dongtak Jeong, Seungyu Rah, Chun Kil Ryu, Jun Lim, Jong Hyun Kim, Hyo-Yun Kim, Boknam Chae |
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| Rok vydání: | 2021 |
| Předmět: |
Materials science
Observational error business.industry General Engineering 02 engineering and technology Substrate (electronics) engineering.material 021001 nanoscience & nanotechnology 01 natural sciences 010309 optics Surface coating Optics Coating Sputtering 0103 physical sciences Vertical direction engineering Deposition (phase transition) Thin film 0210 nano-technology business |
| Zdroj: | Precision Engineering. 71:1-6 |
| ISSN: | 0141-6359 |
| Popis: | A thin-film deposition system was developed for the surface coating of X-ray mirrors of up to 1 m in length. With two coating process areas and four sputtering cathodes, various combinations employing a single layer, multilayered, and co-sputtered thin films are possible. Furthermore, it is possible to correct and modify the mirror surface shape by controlling the speed of the substrate stage. In this study, to evaluate the performance of the proposed coating system, the static coating distribution was measured to check the vertical direction. In a 10 mm area, a 0.9% peak-to-valley error and 0.2% root mean square error occurred. A differential deposition test was also performed for the horizontal direction (stage scan direction). In this study, arbitrary shapes were deposited on 100-mm and 400-mm-long mirrors. After removing the measurement error, the deposition error was less than 1 nm (peak-to-valley). The results demonstrate that this system can correct the surface of an X-ray mirror with ultra-high precision. |
| Databáze: | OpenAIRE |
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