XANES Studies of Zinc Tin Oxide Films Deposited by Atomic Layer Deposition: Revealing Process-Structure Relationships for Amorphous Oxide Semiconductors

Autor:	Orlando Trejo, Tae H. Cho, Sami Sainio, Neil P. Dasgupta
Rok vydání:	2022
Předmět:	General Energy Physical and Theoretical Chemistry Surfaces Coatings and Films Electronic Optical and Magnetic Materials
Zdroj:	The Journal of Physical Chemistry C. 127:338-349
ISSN:	1932-7455 1932-7447
DOI:	10.1021/acs.jpcc.2c05656
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::b34bf26264667697df3926da3f6829f4 https://doi.org/10.1021/acs.jpcc.2c05656 Zobrazit plný text záznamu