Device for detection of cavitation in by spectral analysis in megasonic cleaning

Autor:	Claudio I. Zanelli, Samuel M. Howard, Petrie Yam, Dushyanth Giridhar
Rok vydání:	2013
Předmět:	Semiconductor industry Materials science Acoustics and Ultrasonics Arts and Humanities (miscellaneous) business.industry Cavitation Megasonic cleaning Process (computing) Spectral analysis Wafer Process engineering business
Zdroj:	The Journal of the Acoustical Society of America. 134:3993-3993
ISSN:	0001-4966
DOI:	10.1121/1.4830561
Popis:	The authors present a device and a method to detect cavitation in megasonic cleaning environments. The device is small enough to fit between wafers in the semiconductor industry, allowing the monitoring of the cleaning process.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::b34bc059a41ee3544b7acdaeb82ece3f https://doi.org/10.1121/1.4830561 Zobrazit plný text záznamu