Tellurium-carbon (TeC:H) films for a write-once read many (WORM) optical disk memory
| Autor: | Hideki Ohkawa, Motonari Matsubara, Nobuaki Yasuda, Norio Ozawa |
|---|---|
| Rok vydání: | 1992 |
| Předmět: |
Materials science
Absorption spectroscopy Mechanical Engineering Analytical chemistry chemistry.chemical_element General Chemistry Electronic Optical and Magnetic Materials Amorphous solid Thermogravimetry symbols.namesake X-ray photoelectron spectroscopy Amorphous carbon chemistry Materials Chemistry symbols Electrical and Electronic Engineering Raman spectroscopy Tellurium Carbon |
| Zdroj: | Diamond and Related Materials. 1:697-704 |
| ISSN: | 0925-9635 |
| DOI: | 10.1016/0925-9635(92)90194-s |
| Popis: | A tellurium-carbon (TeC:H) film was deposited by the reactive sputtering of a Te target in an atmosphere containing methane. Raman spectroscopy. X-ray photoelectron spectroscopy (XPS), and FT-IR absorption spectroscopy have shown that the chemical state of carbon in the TeC:H film is not amorphous carbon but rather sp3-hybridized hydrocarbon. Thermal decomposition of the TeC:H film produced sp2-hybridized hydrocarbon gas, which was analyzed by FT-IR/TG (thermogravimetry) measurements. Raman and FT-IR spectroscopies have supported the view that the structure of the TeC:H film is a composite structure consisting of amorphous tellurium and hydrocarbon fragments produced in methane plasma. The ablative optical recording sensitivity of the TeC:H film has been confirmed to be superior to that of a Te film, and its long archival and shelf lives have been recognized by accelerated aging tests. The recording sensitivity of the co-sputtered film consisting of tellurium and graphite carbon was found to be insufficient compared with the sensitivity of the Te film. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
|