Formation of BiSrCaCuO Thin Films with (11n) Orientation on SrTiO3 (110) Substrates by RF Magnetron Sputtering

Autor:	Kazuyoshi Kojima, Koichi Hamanaka, Kenichi Kuroda, Masami Tanioku, Osamu Wada, Kazuo Yokoyama, Junji Tanimura
Rok vydání:	1991
Předmět:	Superconductivity Materials science Sputtering Phase composition Phase (matter) Analytical chemistry Thin film Sputter deposition Orientation (graph theory) High-power impulse magnetron sputtering
Zdroj:	Advances in Superconductivity III ISBN: 9784431681434
DOI:	10.1007/978-4-431-68141-0_232
Popis:	As-grown BiSrCaCuO thin films were grown on SrTiO3(110) substrates at 660 °C by consecutively sputtering. XRD measurement showed that the films with a low-T c phase composition and a high-T c phase composition had main peaks at 2Ө of 31.0° and 31.9°, respectively. The film with a low-T c phase composition is considered to mainly consist of a low-T c phase with (117) orientation.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::b31d4e20eb842464e9d03ef3df70c470 https://doi.org/10.1007/978-4-431-68141-0_232 Zobrazit plný text záznamu