Evidence of residual edge dislocations in czochralski grown Si crystals in 〈110〉 direction
Autor: | M.R.L.N. Murthy, G. Rolland |
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Rok vydání: | 1981 |
Předmět: | |
Zdroj: | Materials Research Bulletin. 16:827-830 |
ISSN: | 0025-5408 |
DOI: | 10.1016/0025-5408(81)90156-2 |
Popis: | The published work on the type of residual dislocations in Si crystals grown in 〈110〉 direction by Czochralski method indicate that screw dislocations are difficult to be eliminated as they are known to run parallel to the axis of growth. Our work shows on the contrary that it is edge type dislocations which are rather difficult to be eliminated. Extensive X-ray topographic studies have been made to establish the type of dislocations and their movements. Also our work on the growth of dislocation-free Si crystals in 〈110〉direction and their mechanism of dislocation movements are briefly described. |
Databáze: | OpenAIRE |
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