Magnetic force microscopy with batch‐fabricated force sensors

Autor:	O. Wolter, Daniel Rugar, R. M. Valletta, Harry Jonathon Mamin, G. Castillo, I. R. McFadyen, T. Bayer, C.‐J. Lin, J. Greschner, Peter Grutter
Rok vydání:	1991
Předmět:	Permalloy Materials science Silicon business.industry Demagnetizing field General Physics and Astronomy chemistry.chemical_element Nanotechnology engineering.material Magnetic field Coating chemistry Microscopy engineering Optoelectronics Magnetic force microscope Thin film business
Zdroj:	Journal of Applied Physics. 69:5883-5885
ISSN:	1089-7550 0021-8979
DOI:	10.1063/1.347856
Popis:	In this paper the properties of force sensors suitable for magnetic force microscopy (MFM) made by coating silicon microcantilevers with various thin magnetic films are analyzed. These MFM force sensors are batch fabricated and their magnetic properties controlled by choosing appropriate coatings. Theoretical calculations show that thin‐film MFM tips have a significantly reduced stray field, a good signal‐to‐noise ratio, and yield improved resolution when compared to etched wire tips. The sample perturbation due to the tip stray field is small, allowing the imaging of low‐coercivity samples such as Permalloy.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::b2a19884e263b710f759caf87ad7d6b3 https://doi.org/10.1063/1.347856 Zobrazit plný text záznamu