Electron Scattering at Epitaxial Ni(001) Surfaces
| Autor: | Pengyuan Zheng, Erik Milosevic, Daniel Gall |
|---|---|
| Rok vydání: | 2019 |
| Předmět: |
010302 applied physics
Diffraction Materials science Condensed matter physics Scattering Electron Epitaxy 01 natural sciences Omega Electronic Optical and Magnetic Materials Electrical resistivity and conductivity Product (mathematics) 0103 physical sciences Electrical and Electronic Engineering Electron scattering |
| Zdroj: | IEEE Transactions on Electron Devices. 66:4326-4330 |
| ISSN: | 1557-9646 0018-9383 |
| DOI: | 10.1109/ted.2019.2934636 |
| Popis: | Epitaxial Ni(001) layers are sputter deposited on MgO(001) substrates and their electrical resistivity $\rho $ measured in situ as a function of thickness ${d}_{{\text {Ni}}}= $ 5–100 nm to quantify the resistivity size effect due to electron surface scattering. X-ray diffraction $\theta $ – ${2}\theta $ scans, $\omega $ -rocking curves, and pole figures confirm an epitaxial layer-substrate relationship with Ni[001] $\|$ MgO[001] and Ni[100] $\|$ MgO[100]. The resistivity is well described with the semiclassical model by Fuchs and Sondheimer and a room-temperature bulk resistivity $\rho _{o}= {7.04}\,\,\mu \Omega $ cm, yielding a bulk electron mean-free path $\lambda = {26}\pm {2}$ and 350 ± 20 nm at 295 and 77 K, respectively. Air exposure causes a resistivity increase by up to 21%, which is attributed to monolayer surface oxidation that results in a transition from 30% specular to completely diffuse electron surface scattering. All measured data are consistent with a temperature-independent product $\rho _{o} \lambda = {18.3} \times {10}^{{-{16}}}\,\,\Omega \text{m}^{{{2}}}$ , which is 4.5 times larger than previously predicted from first-principles, indicating that Ni is less promising as a metal for narrow interconnect lines than those predictions suggest. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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