Precision laser processing of optical microstructures with slab waveguide CO 2 lasers

Autor: P. A. Field, Qiusheng Cao, G.A.J. Markillie, Denis R. Hall, Howard J. Baker, Carsten Janke
Rok vydání: 2000
Předmět:
Zdroj: SPIE Proceedings.
ISSN: 0277-786X
Popis: High precision laser direct writing of two types of micro- optical structure is demonstrated using a workstation built around a commercial CO2 slab waveguide laser. Drift and fluctuations in beam pointing, beam shape and pulse energy are quantified, providing an understanding of the precision capabilities. Quartz glass ablation by waveguide laser pulses of width in the 20 to 60 microsecond range has been characterized and a refractive microlens machined, involving material removal to a depth of 70 micrometer. Surface structures in aluminum with 143 micrometer lattice spacing have been produced to act as two dimensional photonic bandgap devices, modifying the transmission properties of hollow planar waveguides in the mid-infrared.
Databáze: OpenAIRE