Largest possible deviations from stoichiometry transfer during pulsed laser deposition
| Autor: | Bea Jaquet, Christina Klamt, Christian Eberl, Florian Döring, Arne Dittrich, Hans-Ulrich Krebs |
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| Rok vydání: | 2016 |
| Předmět: |
010302 applied physics
Materials science Alloy Analytical chemistry 02 engineering and technology General Chemistry Substrate (electronics) engineering.material 021001 nanoscience & nanotechnology 01 natural sciences Fluence Pulsed laser deposition Homogeneous 0103 physical sciences engineering Deposition (phase transition) General Materials Science Binary system 0210 nano-technology Stoichiometry |
| Zdroj: | Applied Physics A. 122 |
| ISSN: | 1432-0630 0947-8396 |
| DOI: | 10.1007/s00339-016-0234-1 |
| Popis: | One of the major advantages of pulsed laser deposition (PLD) is the ability to transfer complex multicomponent materials stoichiometrically from a target to the growing film on a substrate. Nevertheless, in some systems small deviations from stoichiometry were found. In this paper, we show that it is possible to grow homogeneous alloy films with concentrations over an unprecedented large range of 0–97 wt% W from a single W80Cu20 target by just varying the laser fluence and additionally tilting the substrate during deposition. This is probably the largest deviation from stoichiometry transfer possible in a binary system. |
| Databáze: | OpenAIRE |
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