| Autor: |
Wataru Saito, Satoshi Aida, Masaru Izumisawa, Shigeo Koduki, Ichiro Omura, T. Ogura |
| Rok vydání: |
2003 |
| Předmět: |
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| Zdroj: |
IEEE Transactions on Electron Devices. 50:1801-1806 |
| ISSN: |
0018-9383 |
| DOI: |
10.1109/ted.2003.815126 |
| Popis: |
A new superjunction (SJ) structure offering remarkable advantages compared with the conventional SJ structure is proposed and demonstrated for a power-switching device. In the proposed structure (semi-SJ structure), an n-doped layer is connected to the bottom of the SJ structure. According to the results of experiment and simulation, the semi-SJ structure has both lower on-resistance and softer recovery of body diode than conventional SJ MOSFETs. The fabricated semi-SJ MOSFETs with breakdown voltage of 690 V realize on-resistance 28% lower than that of the conventional SJ MOSFET with same aspect ratio. The softness factor of the body diode is also improved by a factor of five. The proposed MOSFET is very attractive for H bridge topology applications, such as switching mode power supplies and small inverter systems, thanks to the low on-resistance and the soft recovery body diode. |
| Databáze: |
OpenAIRE |
| Externí odkaz: |
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