Determination of the Thickness of Thin Films Based on Scanning Electron Microscopy and Energy Dispersive X-Ray Analysis
| Autor: | Lev N. Sidorov, R. A. Milovanov, S. A. Sokolov |
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| Rok vydání: | 2019 |
| Předmět: |
010302 applied physics
Materials science business.industry Scanning electron microscope Monte Carlo method 02 engineering and technology 021001 nanoscience & nanotechnology 01 natural sciences Surfaces Coatings and Films 0103 physical sciences Optoelectronics Thin film 0210 nano-technology business X ray analysis Energy (signal processing) |
| Zdroj: | Journal of Surface Investigation: X-ray, Synchrotron and Neutron Techniques. 13:836-847 |
| ISSN: | 1819-7094 1027-4510 |
| DOI: | 10.1134/s1027451019050136 |
| Popis: | The review is devoted to modern techniques of the nondestructive determination of the thickness of thin films based on scanning electron microscopy and energy dispersive X-ray analysis. A general approach for determining the thickness of thin films by these methods is described along with detailed specific techniques, their advantages and disadvantages. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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