Composition, structure, and magnetic properties of SiCxNyFez films produced by the PECVD method from a gas mixture of 1,1,1,3,3,3-hexamethyldisilazane, ferrocene, and helium

Autor:	A.G. Plekhanov, E.A. Maksimovskiy, V.V. Kriventsov, I.V. Korolkov, A.A. Saraev, A.N. Lavrov, M.A. Grebenkina, A.N. Kolodin, V.A. Trunova
Rok vydání:	2022
Předmět:	Colloid and Surface Chemistry
Zdroj:	Colloids and Surfaces A: Physicochemical and Engineering Aspects. 655:130333
ISSN:	0927-7757
DOI:	10.1016/j.colsurfa.2022.130333
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::b17e8ad5e9bc941ff9d7b76dadcaa7a0 https://doi.org/10.1016/j.colsurfa.2022.130333 Zobrazit plný text záznamu Full Text from ScienceDirect