Nanometrology and features of metrological assurance of measurements of the roughness and relief parameters of nanostructured surfaces

Autor:	S. Yu. Zolotarevskii, K. L. Gubskii, P. N. Luskinovich, V. G. Lysenko, V. V. Soloviov
Rok vydání:	2011
Předmět:	Scanning probe microscopy Materials science Nanometrology Optics Traceability business.industry Applied Mathematics Calibration Mechanical engineering Surface finish business Instrumentation Metrology
Zdroj:	Measurement Techniques.
ISSN:	1573-8906 0543-1972
DOI:	10.1007/s11018-011-9644-9
Popis:	Questions related to metrological assurance of measurements of the roughness and relief parameters of nanostructured surfaces are considered. On the basis of an analysis of current developments in the area of scanning probe microscopy, a description of the physical and technical characteristics of different types of instruments for measurements in the nanodimensional range is given and the traceability of these characteristics to standards of the unit of length is demonstrated.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::b164eaabcd06739ae31677e82c8737b2 https://doi.org/10.1007/s11018-011-9644-9 Zobrazit plný text záznamu Full text from SpringerLink