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The implementation of a real-time imaging system to support the robotic transfer of semiconductor wafers within an ion implanter is described. Since the system is to be embedded in a product, it must be economically viable, and therefore capable of being supported by an inexpensive computing platform. In practice, this can be achieved by exploiting the inherent constraints. In this application, a great deal of the geometry of the environment to be sensed is known a priori, which has resulted in the implementation of an optimal system configuration. This has been performed in a controlled manner, and thus the flexibility of the overall system has not been compromised. (6 pages) |
