Autor:	Daw Ma
Rok vydání:	2005
Předmět:	Engineering Random access memory Computer-integrated manufacturing business.industry Semiconductor device fabrication Manufacturing Process development execution system Advanced manufacturing Electronics business Game theory Manufacturing engineering
Zdroj:	Semiconductor Manufacturing Technology Workshop, 2002.
DOI:	10.1109/smtw.2002.1197365
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::b1391f8767fdeeb2e49c10053d7297b4 https://doi.org/10.1109/smtw.2002.1197365 Zobrazit plný text záznamu