| Autor: | Yutaka Sawada, Mieko Ide, Azusa Shida, M. Sano, T. Aoyama, N. Miyabayashi, Shigeyuki Seki, Yoichi Hoshi, M Ogawa, H. Yoshida |
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| Rok vydání: | 2002 |
| Předmět: | |
| Zdroj: | Journal of Thermal Analysis and Calorimetry. 69:1021-1028 |
| ISSN: | 1418-2874 |
| DOI: | 10.1023/a:1020649232003 |
| Popis: | Tin-doped In2O3 (indium-tin-oxide) transparent conducting films are widely used as electrodes of liquid crystal displays and low-E windows. In the present study, a systematic TDS study was undertaken for ITO films fabricated by various deposition processes; such as PVD, dip coating and spray deposition. Water vapor was the main gas evolved from the films; gas evolution from the silicon substrate was negligible. The evolution proceeded via two steps at approximately 373 and 473-623 K. The amount of the evolved water was in the order: (dip-coated film)>(PVD films)> (spray-deposited film). This order was identical to that of the film's resistivities. |
| Databáze: | OpenAIRE |
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