High strain behavior of composite thin film piezoelectric membranes
| Autor: | Jack L. Skinner, David F. Bahr, A. L. Olson, I. Demir, Robert F. Richards, C. D. Richards |
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| Rok vydání: | 2004 |
| Předmět: |
Materials science
Composite number Deflexion Condensed Matter Physics Piezoelectricity Atomic and Molecular Physics and Optics Surfaces Coatings and Films Electronic Optical and Magnetic Materials Membrane Deflection (engineering) Residual stress Ultimate tensile strength Forensic engineering Electrical and Electronic Engineering Thin film Composite material |
| Zdroj: | Microelectronic Engineering. 75:12-23 |
| ISSN: | 0167-9317 |
| DOI: | 10.1016/j.mee.2003.10.007 |
| Popis: | The behavior of thin-film piezoelectric membranes at high deflections and strains for use as generators is examined. Experiments are conducted with a bulge tester to obtain pressure-deflection relationships, residual stresses, and electrical output characteristics of the piezoelectric membranes. A model is developed using an energy minimization technique. The experimental results are compared to the modeled results. Experimental results have shown that increasing PZT thickness and the Ti ratio of the PZT chemistry lead to increased power output for a given deflection. The presence of tensile residual stress in the composite structure can result in lower deflections for a given force and thus impact electrical output. Increasing the Ti ratio leads to a reduction in residual stress. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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