Preparation of TiN-Based Nitride Composite Films from Alkoxide Solution by Liquid Injection Thermal Plasma CVD Method

Autor:	Jiro Tsujino, Yusuke Takada, Kenichi Tsukurimichi, Shiro Shimada
Rok vydání:	2004
Předmět:	Materials science Liquid injection Mechanical Engineering Inorganic chemistry Composite number chemistry.chemical_element Composite film Plasma Nitride chemistry.chemical_compound chemistry Chemical engineering Mechanics of Materials Alkoxide Thermal General Materials Science Tin
Zdroj:	Key Engineering Materials. :49-52
ISSN:	1662-9795
DOI:	10.4028/www.scientific.net/kem.264-268.49
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::b0b97e4829d6488afc1fb9332c55d060 https://doi.org/10.4028/www.scientific.net/kem.264-268.49 Zobrazit plný text záznamu