Important of MoS2-Compound Sputtering even with Sulfur-Vapor Anneal for Chip-Size Fabrication
| Autor: | Shinya Imai, Takuya Hamada, Masaya Hamada, Takanori Shirokura, Iriya Muneta, Kuniyuki Kakushima, Tetsuya Tatsumi, Shigetaka Tomiya, Kazuo Tsutsui, Hitoshi Wakabayashi |
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| Rok vydání: | 2020 |
| Zdroj: | Extended Abstracts of the 2020 International Conference on Solid State Devices and Materials. |
| Databáze: | OpenAIRE |
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